![]() ![]() The POCl 3 concentration of 0.15 % and the optimized phosphorus diffusion parameters lead to the efficiency of 14.1%. The best result was found with the temperature of 875 ✬. The steps of the phosphorus diffusion were experimentally optimized. ![]() First, the aluminum diffusion was performed and, then, the POCl 3 was introduced into the quartz tube. To avoid the wafer bowing during aluminum paste firing, the aluminum was deposited by e-beam and co-diffused in the same thermal step that the phosphorus diffusion. The goal of this paper is to analyze the influence of phosphorus diffusion parameters on the electrical characteristics of p-type mc-Si solar cells processed with a single-step diffusion of phosphorus and aluminum. The diffusion of phosphorus and aluminum in a single-step thermal process may reduce the production cost of multicrystalline silicon (mc-Si) solar cells. ![]()
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